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Tronics develops piezoresistive 6DOF MEMS

05 Mar 2014  | Peter Clarke

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Using piezoresistive nanowire technology licensed from research institute CEA-Leti, Tronics Microsystems has succeeded in prototyping its first batch of 6-degrees-of-freedom (6DOF) MEMS chips.

The 4mm2 die includes three accelerometres and three gyroscopes. Tronics claims it is one of the smallest 6DOF die in the industry with scope for further optimisation to make it the smallest.

The piezoresistive nanowire technology allows manufacture of multiple sensor types, including accelerometres, gyroscopes, magnetometres, pressure sensors and microphones, in a single manufacturing process technology and increasing opportunities for monolithic integration.

The sensor sensitivity, power consumption and noise characteristics are in line with the design models, Tronics said. Industrialisation work will continue during 2014 and samples are due to be available in 4Q14. An ASIC is also being designed to complete the sensor

platform. Tronics has also designed a 9DOF monolithic MEMS.




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