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Dry pump optimized for solar, FPD processes

15 Dec 2011

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Edwards Ltd has expanded its family of harsh process dry pumps with the iXH500H series. These 500m3/h pumps has been optimized for flat panel, solar and advanced semiconductor processes requiring high gas flows and flexible temperature profiles. The devices offer significant cost of ownership benefits, resulting from lower energy consumption and enhanced mean time between servicing (MTBS), while delivering small footprint and hydrogen pumping capabilities.

The iXH500H series, with its increased pump temperature flexibility, also reduce pump energy consumption by up to 15 percent. As a result, the iXH500H may yield a 30 percent lower cost of ownership as compared to previous-generation iXH dry pumps.

The temperature flexibility of the iXH500H series makes it ideal for harsh processes. Running at low pump temperatures, these pumps are beneficial for processes that use high flows of corrosive gases (e.g. FPD PECVD, thin film solar PECVD, semiconductor MOCVD), or for processes that use thermally sensitive pre-cursors (e.g. atomic layer deposition) that could 'plate out' by-products within the pump. High operating temperatures can be used where the risk is condenzation of by-products within the pump (e.g. high-k dielectric deposition).

Edwards' iXH500H series pumps are now available. Service upgrades are also available to convert existing series pumps to the new iXH500H variant.

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